This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It is intended as a textbook for undergraduate students in applied physics, electronics engineering, and materials science. It can also serve as a reference for practicing engineers and scientists who need an update on device and technology developments.

Contents
Chapter 1 Introduction

Part I Semiconductor Physics
Chapter 2 Energy Bands and Carrier Concentration in Thermal Equilibrium
Chapter 3 Carrier Transport Phenomena

Part II Semiconductor Devices
Chapter 4 p-n Junction
Chapter 5 Bipolar Transistor and Related Devices
Chapter 6 MOSFET and Related Devices
Chapter 7 MESFET and Related Devices
Chapter 8 Microwave Diodes, Quantum-Effect, and Hot-Electron Devices
Chapter 9 Photonic Devices

Part III Semiconductor Technology
Chapter 10 Crystal Growth and Epitaxy
Chapter 11 Film Formation
Chapter 12 Lithography and Etching
Chapter 13 Impurity Doping
Chapter 14 Integrated Devices
Appendix
Index