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Microsystem Design (Record no. 2033)

MARC details
000 -LEADER
fixed length control field 02597nam a22002177a 4500
003 - CONTROL NUMBER IDENTIFIER
control field OSt
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20181205135603.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 181205b ||||| |||| 00| 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 978-81-8128-546-1
028 ## - PUBLISHER NUMBER
Source Allied Informatics, Jaipur
Bill Number 5670
Bill Date 27/11/2018
Purchase Year 2018-19
040 ## - CATALOGING SOURCE
Original cataloging agency BSDU
Language of cataloging English
Transcribing agency BSDU
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381
Item number SEN
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Senturia, Stephen D.
245 ## - TITLE STATEMENT
Title Microsystem Design
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. New Delhi
Name of publisher, distributor, etc. Springer (India) Pvt. Ltd.
Date of publication, distribution, etc. 2015
300 ## - PHYSICAL DESCRIPTION
Extent 689
500 ## - GENERAL NOTE
General note It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Contents:<br/>Part I Getting Started<br/>Introduction<br/>An Approach to MEMS Design<br/>Microfabrication<br/>Process Integration<br/><br/>Part II Modeling Strategies<br/>Lumped Modeling<br/>Energy-Conserving Trasducers<br/>Dynamics<br/><br/>Part III Domain-Specific Details<br/>Elasticity<br/>Structures<br/>Energy Methods<br/>Dissipation and the Thermal Energy Domain<br/>Lumped Modeling of Dissipative Processes<br/>Fluids<br/>Circuit and System Issues<br/>Feedback Systems<br/>Case Studies<br/>A Piezoresistive Pressure Sensor<br/>A Capacity Accelerometer<br/>A Piezoelectric Rate Gyroscope<br/>DNA Amplification<br/>A Microbridge Gas Sensor<br/>
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Electronics
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme Dewey Decimal Classification
Koha item type Books
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Collection code Home library Current library Date acquired Cost, normal purchase price Total Checkouts Full call number Barcode Date last seen Date last checked out Cost, replacement price Price effective from Koha item type
    Dewey Decimal Classification   Not For Loan Reference BSDU Knowledge Resource Center, Jaipur BSDU Knowledge Resource Center, Jaipur 12/05/2018 1195.00 3 621.381 SEN 017643 02/12/2020 11/20/2019 1195.00 12/05/2018 Books