Microsensors MEMS and Smart Devices
Material type:
TextPublisher number: Allied Informatics, Jaipur | 2018-19Publication details: New Delhi Wiley India Pvt. Ltd. 2013Description: 503ISBN: - 978-81-265-4082-2
- 621.381 GAR
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| 621.381 5 SIN Electronic Devices & Circuits | 621.381 5 TIW Electronic Devices & Circuits – I | 621.381 CHA Electronics : Fundamentals and Applications | 621.381 GAR Microsensors MEMS and Smart Devices | 621.381 KAU Analog Electronic Circuits | 621.381 KAU Analog Electronic (Circuits and Devices) | 621.381 SED A Textbook of Applied Electronics |
From smart wallpaper designed to reduce noise in helicopters to the electronic tongues used in the food industry, smart devices are having a growing impact. Gardner and Varadan report on recent developments in both the integration of a micro sensor and its microelectronic circuitry to produce a smart sensor ant the integration of a micro sensor, a Microactuators and their microelectronic circuitry to produce a microsystem
Contents:
Electronic Materials and Processing
• MEMS Materials and their Preparation
• Standard Microelectronic Technologies
• Silicon Micromachining: Bulk
• Silicon Micromachining: Surface
• Microstereolithography for MEMS
• Micro sensors
• Introduction to SAW Devices
• Surface Acoustic Waves in Solids
• IDT Micro sensor Parameter Measurement
• IDT Micro sensor Fabrication
• IDT Micro sensor
• MEMS-IDT Micro sensor
• Smart Sensors and MEMS
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