The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. Varadan's book will be the first of it's kind to address this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities.

Contents:
Preface

· Microelectromechanical Systems (MEMS) and Radio Frequency MEMS

· MEMS Materials and Fabrication Techniques

· RF MEMS Switches and Micro Relays

· MEMS Inductors and Capacitors

· Micromachined RF Filters

· Micromachined Phase Shifters

· Micromachined Transmission Lines and Components

· Micromachined Antennae

· Integration and Packaging for RF MEMS Devices

Index