01498nam a22002177a 4500003000400000005001700004008004100021020002200062028005800084040002400142082001700166100002300183245004000206260004300246300000800289500043000297504048800727650001701215700002201232700002601254OSt20181205134407.0181205b           ||||| |||| 00| 0 eng d  a978-81-265-4082-2  bAllied Informatics, Jaipurc5670d27/11/2018q2018-19  aBSDUbEnglishcBSDU  a621.381bGAR  aGardner, Julian W.  aMicrosensors MEMS and Smart Devices  aNew DelhibWiley India Pvt. Ltd.c2013  a503  aFrom smart wallpaper designed to reduce noise in helicopters to the electronic tongues used in the food industry, smart devices are having a growing impact. Gardner and Varadan report on recent developments in both the integration of a micro sensor and its microelectronic circuitry to produce a smart sensor ant the integration of a micro sensor, a Microactuators and their microelectronic circuitry to produce a microsystem  aContents:
Electronic Materials and Processing

•	MEMS Materials and their Preparation

•	Standard Microelectronic Technologies

•	Silicon Micromachining: Bulk

•	Silicon Micromachining: Surface

•	Microstereolithography for MEMS

•	Micro sensors

•	Introduction to SAW Devices

•	Surface Acoustic Waves in Solids

•	IDT Micro sensor Parameter Measurement

•	IDT Micro sensor Fabrication

•	IDT Micro sensor

•	MEMS-IDT Micro sensor

•	Smart Sensors and MEMS  aElectronics   aVaradan, Vijay K.  aAwadeldarim, Osama O.