01576nam a22002417a 4500 2032 2032 OSt 20181205134407.0 181205b ||||| |||| 00| 0 eng d 978-81-265-4082-2 Allied Informatics, Jaipur 5670 27/11/2018 2018-19 BSDU English BSDU 621.381 GAR Gardner, Julian W. Microsensors MEMS and Smart Devices New Delhi Wiley India Pvt. Ltd. 2013 503 From smart wallpaper designed to reduce noise in helicopters to the electronic tongues used in the food industry, smart devices are having a growing impact. Gardner and Varadan report on recent developments in both the integration of a micro sensor and its microelectronic circuitry to produce a smart sensor ant the integration of a micro sensor, a Microactuators and their microelectronic circuitry to produce a microsystem Contents: Electronic Materials and Processing • MEMS Materials and their Preparation • Standard Microelectronic Technologies • Silicon Micromachining: Bulk • Silicon Micromachining: Surface • Microstereolithography for MEMS • Micro sensors • Introduction to SAW Devices • Surface Acoustic Waves in Solids • IDT Micro sensor Parameter Measurement • IDT Micro sensor Fabrication • IDT Micro sensor • MEMS-IDT Micro sensor • Smart Sensors and MEMS Electronics Varadan, Vijay K. Awadeldarim, Osama O. ddc BK 0 0 ddc 0 0 BSDU BSDU GEN 2018-12-05 995.00 2 621.381 GAR 017642 2020-02-12 00:00:00 2019-11-01 995.00 2018-12-05 BK