Gardner, Julian W. creator Varadan, Vijay K. Awadeldarim, Osama O. text New Delhi Wiley India Pvt. Ltd. 2013 monographic eng

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503 From smart wallpaper designed to reduce noise in helicopters to the electronic tongues used in the food industry, smart devices are having a growing impact. Gardner and Varadan report on recent developments in both the integration of a micro sensor and its microelectronic circuitry to produce a smart sensor ant the integration of a micro sensor, a Microactuators and their microelectronic circuitry to produce a microsystem Contents: Electronic Materials and Processing • MEMS Materials and their Preparation • Standard Microelectronic Technologies • Silicon Micromachining: Bulk • Silicon Micromachining: Surface • Microstereolithography for MEMS • Micro sensors • Introduction to SAW Devices • Surface Acoustic Waves in Solids • IDT Micro sensor Parameter Measurement • IDT Micro sensor Fabrication • IDT Micro sensor • MEMS-IDT Micro sensor • Smart Sensors and MEMS Electronics 621.381 GAR 978-81-265-4082-2 Allied Informatics, Jaipur BSDU 181205 20181205134407.0 English