TY  - BOOK
AU  - Gardner, Julian W.
AU  - Varadan, Vijay K.
AU  - Awadeldarim, Osama O.
TI  - Microsensors MEMS and Smart Devices
SN  - 978-81-265-4082-2
U1  - 621.381 
PY  - 2013///
CY  - New Delhi
PB  - Wiley India Pvt. Ltd.
KW  - Electronics
N1  - From smart wallpaper designed to reduce noise in helicopters to the electronic tongues used in the food industry, smart devices are having a growing impact. Gardner and Varadan report on recent developments in both the integration of a micro sensor and its microelectronic circuitry to produce a smart sensor ant the integration of a micro sensor, a Microactuators and their microelectronic circuitry to produce a microsystem; Contents:
Electronic Materials and Processing

•	MEMS Materials and their Preparation

•	Standard Microelectronic Technologies

•	Silicon Micromachining: Bulk

•	Silicon Micromachining: Surface

•	Microstereolithography for MEMS

•	Micro sensors

•	Introduction to SAW Devices

•	Surface Acoustic Waves in Solids

•	IDT Micro sensor Parameter Measurement

•	IDT Micro sensor Fabrication

•	IDT Micro sensor

•	MEMS-IDT Micro sensor

•	Smart Sensors and MEMS
ER  -