@book{511,
	author = {May, Gary S  and  Sze, Simon M},
	title = {Fundamentals of Semiconductor Fabrication},
	publisher = {Wiley India Pvt. Ltd. India},
	year = {2016,c2004},
	address = { New Delhi},
	note = {From crystal growth to integrated devices and circuits, this new book offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence.}
}