01645nam a2200241Ia 4500 511 511 0001923 OSt 20190314163528.0 170602s9999 xx 000 0 und d 9788126532605 2016 Allied Informatics, Jaipur English BSDU BSDU 621.381.52 MAY . May, Gary S Fundamentals of Semiconductor Fabrication Wiley India Pvt. Ltd. India New Delhi 2016,c2004 305 From crystal growth to integrated devices and circuits, this new book offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence. Contents · Introduction. · Crystal Growth. · Silicon Oxidation. · Photolithography. · Etching. · Diffusion. · Ion Implantation. · Film Deposition. · Process Integration. · IC Manufacturing. · Future Trends and Challenges. Appendix A: List of Symbols. Appendix B: International System of Units (SI Units). Appendix C: Unit Prefixes. Appendix D: Greek Alphabet. Appendix E: Physical Constants. Appendix F: Properties of Si and GaAs at 300 K. Appendix G: Some Properties of the Error Function. Appendix H: Basic Kinetic Theory of Gases. Appendix I: SUPREM Commands. Appendix J: Running PROLITH. Appendix K. Percentage Points of the t Distribution. Appendix L: Percentage Points of the F Distribution. Index. Electronics Sze, Simon M ddc BK 0 0 ddc 0 0 BSDU BSDU 2016-12-08 679.00 0 621.381.52 MAY . 001923 2020-02-12 00:00:00 679.00 2017-06-02 BK 0 0 ddc 0 0 BSDU BSDU 2016-12-08 679.00 0 621.381.52 MAY . 001924 2020-02-12 00:00:00 679.00 2017-06-02 BK 0 0 ddc 0 1 RB BSDU BSDU 2016-12-08 679.00 0 621.381.52 MAY . 001925 2020-02-12 00:00:00 679.00 2017-06-02 BK 0 0 ddc 0 0 BSDU BSDU 2016-12-08 679.00 0 621.381.52 MAY . 001926 2020-02-12 00:00:00 679.00 2017-06-02 BK 0 0 ddc 0 0 BSDU BSDU 2016-12-08 679.00 0 621.381.52 MAY . 001927 2020-02-12 00:00:00 679.00 2017-06-02 BK 0 0 ddc 0 0 BSDU BSDU 2016-12-12 679.00 0 621.381.52 MAY . 002274 2020-02-12 00:00:00 679.00 2017-06-02 BK 0 0 ddc 0 0 BSDU BSDU 2016-12-12 679.00 0 621.381.52 MAY . 002275 2020-02-12 00:00:00 679.00 2017-06-02 BK 0 0 ddc 0 0 BSDU BSDU 2016-12-12 679.00 0 621.381.52 MAY . 002276 2020-02-12 00:00:00 679.00 2017-06-02 BK 0 0 ddc 0 0 BSDU BSDU 2016-12-12 679.00 0 621.381.52 MAY . 002277 2020-02-12 00:00:00 679.00 2017-06-02 BK 0 0 ddc 0 0 BSDU BSDU 2016-12-12 679.00 0 621.381.52 MAY . 002278 2020-02-12 00:00:00 679.00 2017-06-02 BK