TY  - BOOK
AU  - May, Gary S 
AU  -  Sze, Simon M
TI  - Fundamentals of Semiconductor Fabrication
SN  - 9788126532605
U1  - 621.381.52 
PY  - 2016///,c2004
CY  -  New Delhi
PB  - Wiley India Pvt. Ltd. India
KW  - Electronics
N1  - From crystal growth to integrated devices and circuits, this new book offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence; Contents
·	Introduction.

·	Crystal Growth.

·	Silicon Oxidation.

·	Photolithography.

·	Etching.

·	Diffusion.

·	Ion Implantation.

·	Film Deposition.

·	Process Integration.

·	IC Manufacturing.

·	Future Trends and Challenges.

Appendix A: List of Symbols.

Appendix B: International System of Units (SI Units).

Appendix C: Unit Prefixes.

Appendix D: Greek Alphabet.

Appendix E: Physical Constants.

Appendix F: Properties of Si and GaAs at 300 K.

Appendix G: Some Properties of the Error Function.

Appendix H: Basic Kinetic Theory of Gases.

Appendix I: SUPREM Commands.

Appendix J: Running PROLITH.

Appendix K. Percentage Points of the t Distribution.

Appendix L: Percentage Points of the F Distribution.

Index
ER  -