Microsensors MEMS and Smart Devices

By:

Gardner, Julian W

Contributor(s):

Material type:

TextPublisher number: Allied Informatics, Jaipur | 2018-19Publication details: New Delhi Wiley India Pvt. Ltd. 2013Description: 503ISBN:

978-81-265-4082-2

Subject(s):

Electronics

DDC classification:

621.381 GAR

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Holdings
Item type	Current library	Call number	Status	Barcode
Books	BSDU Knowledge Resource Center, Jaipur General Stacks	621.381 GAR (Browse shelf(Opens below))	Available	017642

From smart wallpaper designed to reduce noise in helicopters to the electronic tongues used in the food industry, smart devices are having a growing impact. Gardner and Varadan report on recent developments in both the integration of a micro sensor and its microelectronic circuitry to produce a smart sensor ant the integration of a micro sensor, a Microactuators and their microelectronic circuitry to produce a microsystem

Contents:
Electronic Materials and Processing

• MEMS Materials and their Preparation

• Standard Microelectronic Technologies

• Silicon Micromachining: Bulk

• Silicon Micromachining: Surface

• Microstereolithography for MEMS

• Micro sensors

• Introduction to SAW Devices

• Surface Acoustic Waves in Solids

• IDT Micro sensor Parameter Measurement

• IDT Micro sensor Fabrication

• IDT Micro sensor

• MEMS-IDT Micro sensor

• Smart Sensors and MEMS

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