000			01576nam a22002417a 4500
999			_c2032 _d2032
003			OSt
005			20181205134407.0
008			181205b ||||| |||| 00| 0 eng d
020			_a978-81-265-4082-2
028			_bAllied Informatics, Jaipur _c5670 _d27/11/2018 _q2018-19
040			_aBSDU _bEnglish _cBSDU
082			_a621.381 _bGAR
100			_aGardner, Julian W.
245			_aMicrosensors MEMS and Smart Devices
260			_aNew Delhi _bWiley India Pvt. Ltd. _c2013
300			_a503
500			_aFrom smart wallpaper designed to reduce noise in helicopters to the electronic tongues used in the food industry, smart devices are having a growing impact. Gardner and Varadan report on recent developments in both the integration of a micro sensor and its microelectronic circuitry to produce a smart sensor ant the integration of a micro sensor, a Microactuators and their microelectronic circuitry to produce a microsystem
504			_aContents: Electronic Materials and Processing • MEMS Materials and their Preparation • Standard Microelectronic Technologies • Silicon Micromachining: Bulk • Silicon Micromachining: Surface • Microstereolithography for MEMS • Micro sensors • Introduction to SAW Devices • Surface Acoustic Waves in Solids • IDT Micro sensor Parameter Measurement • IDT Micro sensor Fabrication • IDT Micro sensor • MEMS-IDT Micro sensor • Smart Sensors and MEMS
650			_aElectronics
700			_aVaradan, Vijay K.
700			_aAwadeldarim, Osama O.
942			_2ddc _cBK