000			01644nam a22002417a 4500
999			_c2038 _d2038
003			OSt
005			20181205153736.0
008			181205b ||||| |||| 00| 0 eng d
020			_a978-81-265-2991-9
028			_bAllied Informatics, Jaipur _c5670 _d27/11/2018 _q2018-19
040			_aBSDU _bEnglish _cBSDU
082			_a621.381413 _bVAR
100			_aVaradan, Vijay K.
245			_aRF MEMS and Their Applications
260			_aNew Delhi _b Wiley India Pvt. Ltd. _c2011
300			_a394
500			_aThe incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. Varadan's book will be the first of it's kind to address this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities.
504			_aContents: Preface · Microelectromechanical Systems (MEMS) and Radio Frequency MEMS · MEMS Materials and Fabrication Techniques · RF MEMS Switches and Micro Relays · MEMS Inductors and Capacitors · Micromachined RF Filters · Micromachined Phase Shifters · Micromachined Transmission Lines and Components · Micromachined Antennae · Integration and Packaging for RF MEMS Devices Index
650			_aElectronics
700			_aVinoy, K. J
700			_aJose, K. A.
942			_2ddc _cBK